Bipolar technology for the most demanding requirements
The process power supplies from the TruPlasma Bipolar Series 4000 (G2) were specially developed for plasma-based coating by means of physical vapor deposition (PVD), plasma-enhanced chemical vapor deposition (PECVD), and reactive sputtering processes. As a result of their configurable output signal and sophisticated ARC management, these latest generation, bipolar pulsers are extremely versatile. Regardless of whether the application is semi-conductor and solar cell manufacturing, or coating architectural glazing, you can always expect maximum performance in terms of coating quality and rates.
Fully digital arc management for the highest coating quality and productivity.
Simple adjustment to various processes by varying the output signal.
DC, pulsed DC and bipolar: Save on costs due to diverse settings.
No external components are required, meaning it only requires a small amount of space.
First-rate power supply
Typical areas of application include semi-conductor and photovoltaics production, coating architectural glazing, and manufacturing decorative and wear-resistant coatings of the highest quality. PVD and PECVD processes, in particular, are used for this.
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TruPlasma Bipolar 4010 (G2)
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TruPlasma Bipolar 4020 (G2)
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TruPlasma Bipolar 4030 (G2)
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TruPlasma Bipolar 4040 (G2)
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TruPlasma Bipolar 4060 (G2)
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|---|---|---|---|---|---|
| Output | |||||
| Rated output | 10 kW | 20 kW | 30 kW | 40 kW | 60 kW |
| Maximum output current | 25 A eff | 50 A eff | 75 A eff | 100 A eff | 150 A eff |
| Maximum output voltage | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff |
| Nominal operating frequency | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz |
| Arc parameter | |||||
| Maximum arc rate | 20000 1/s | 20000 1/s | 20000 1/s | 20000 1/s | 20000 1/s |
| Arc energy | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW |
| Ignition voltage | |||||
| with auxiliary ignition | 2000 V | 2000 V | 2000 V | 2000 V | 2000 V |
| Network connection data | |||||
| Line voltage | 380 480 V | 380 480 V | 380 480 V | 380 480 V | 380 480 V |
| Line frequency | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz |
| Power factor | 0.95 | 0.95 | 0.95 | 0.95 | 0.95 |
| Communication interfaces | |||||
| Analog/digital | Yes | Yes | Yes | Yes | Yes |
| RS 232 / RS 485 | Yes | Yes | Yes | Yes | Yes |
| PROFIBUS | Yes | Yes | Yes | Yes | Yes |
| EtherCAT | Yes | Yes |
Yes
- |
Yes | Yes |
| DeviceNet | Yes | Yes |
Yes
- |
Yes | Yes |
| Housing | |||||
| Width | 482 mm | 482 mm | 482 mm | 482 mm | 482 mm |
| Height | 178 mm | 266 mm | 355 mm | 355 mm | 622 mm |
| Depth | 683 mm | 683 mm | 683 mm | 683 mm | 683 mm |
| Weight | 60 kg | 60 kg | 100 kg | 100 kg | 160 kg |
| IP protection class | IP40 | IP40 | IP40 | IP40 | IP40 |
| Cooling requirements | |||||
| Coolant | Water | Water | Water | Water | Water |
| Max. water pressure | 7 bar | 7 bar | 7 bar | 7 bar | 7 bar |
| Min. pressure differential | 3 bar | 3 bar | 3 bar | 3 bar | 3 bar |
| Min. flow rate | 4 l/min | 8 l/min | 8 l/min | 12 l/min | 12 l/min |
| Coolant temperature | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C |
| General | |||||
| Overall efficiency | 90 % | 90 % | 90 % | 90 % | 90 % |
| Ambient conditions | |||||
| Outside temperature | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C |
| Humidity | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % |
| Barometric pressure | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa |
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TruPlasma Bipolar 4010 (G2)
|
TruPlasma Bipolar 4020 (G2)
|
TruPlasma Bipolar 4030 (G2)
|
TruPlasma Bipolar 4040 (G2)
|
TruPlasma Bipolar 4060 (G2)
|
|
|---|---|---|---|---|---|
| Output | |||||
| Rated output | 10 kW | 20 kW | 30 kW | 40 kW | 60 kW |
| Maximum output current | 25 A eff | 50 A eff | 75 A eff | 100 A eff | 150 A eff |
| Maximum output voltage | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff |
| Nominal operating frequency | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz | 20 kHz - 80 kHz |
| Arc parameter | |||||
| Maximum arc rate | 20000 1/s | 20000 1/s | 20000 1/s | 20000 1/s | 20000 1/s |
| Arc energy | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW | 0.3 mJ/kW |
| Ignition voltage | |||||
| with auxiliary ignition | 2000 V | 2000 V | 2000 V | 2000 V | 2000 V |
| Network connection data | |||||
| Line voltage | 380 480 V | 380 480 V | 380 480 V | 380 480 V | 380 480 V |
| Line frequency | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz |
| Power factor | 0.95 | 0.95 | 0.95 | 0.95 | 0.95 |
| Communication interfaces | |||||
| Analog/digital | Yes | Yes | Yes | Yes | Yes |
| RS 232 / RS 485 | Yes | Yes | Yes | Yes | Yes |
| PROFIBUS | Yes | Yes | Yes | Yes | Yes |
| EtherCAT | Yes | Yes |
Yes
- |
Yes | Yes |
| DeviceNet | Yes | Yes |
Yes
- |
Yes | Yes |
| Housing | |||||
| Width | 482 mm | 482 mm | 482 mm | 482 mm | 482 mm |
| Height | 178 mm | 266 mm | 355 mm | 355 mm | 622 mm |
| Depth | 683 mm | 683 mm | 683 mm | 683 mm | 683 mm |
| Weight | 60 kg | 60 kg | 100 kg | 100 kg | 160 kg |
| IP protection class | IP40 | IP40 | IP40 | IP40 | IP40 |
| Cooling requirements | |||||
| Coolant | Water | Water | Water | Water | Water |
| Max. water pressure | 7 bar | 7 bar | 7 bar | 7 bar | 7 bar |
| Min. pressure differential | 3 bar | 3 bar | 3 bar | 3 bar | 3 bar |
| Min. flow rate | 4 l/min | 8 l/min | 8 l/min | 12 l/min | 12 l/min |
| Coolant temperature | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C |
| General | |||||
| Overall efficiency | 90 % | 90 % | 90 % | 90 % | 90 % |
| Ambient conditions | |||||
| Outside temperature | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C |
| Humidity | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % |
| Barometric pressure | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa |
Perfect coatings, high productivity
Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. Even in demanding reactive processes, the TruPlasma Bipolar Series 4000 (G2) always guarantees a uniform process power supply and thus a stable plasma condition.
More flexibility, lower costs
Adjustable wave forms mean that you can very easily adjust the TruPlasma Bipolar Series 4000 (G2) generators to suit a variety of process requirements. With the flexible selection of the output signal (DC, pulsed DC or bipolar), they can be used with versatility, thereby helping to reduce your total cost of ownership (TCO).
Everything in a single housing
No external components are needed due to the water cooling which is fully integrated in the environmentally-protected generator housing.
PVD Power
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction. Display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
By selecting from a variety of system components, you can optimally adjust your bipolar pulse generator to your system environment.
Various cable and connector designs are available for different connection standards.
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
