- Drive lasers for EUV lithography: Creating high-tech customer value
Dr. Matthias Wissert, Head of R&D Development, TRUMPF
- Accelerating innovation cycles for process power supplies
Felix Reichenbach, Management Electronics, TRUMPF
Dr. Jan Peter Engelstädter, Head of Business Unit RF Electronics, TRUMPF
- Ultrafast lasers: Industrial state of the art and future possibilities
Dr. Dirk Sutter, Head of R&D Ultrafast Laser, TRUMPF
- Structured light for ultrafast laser micro- and nanomachining
Dr. Daniel Flamm, R&D Advanced Development, TRUMPF
- Pushing the limits of ultrashort pulse laser materials processing
Dr. Ulf Quentin, Director Sales Micromachining, TRUMPF
- How photonics is pushing quantum technologies to markets
Dr. Michael Förtsch, Chief Executive Officer, Q.ANT
Semicon Spotlight 2021 – Endless opportunities
Light is a defining component of the semiconductor industry. The role of photons is increasing in electronic devices. Precisely controlled lasers for lithography are the basic technology of semiconductor manufacturing, and modern optical systems are the heart of measurement technology.
With its long history in laser technology, TRUMPF has developed lasers, applications and processes for a wide variety of industries. Lasers act without mechanical forces and can be focused with the highest precision to spot sizes in the micro- and nanometer range.
In our Semicon Spotlight, we focus on photonic technologies in the semiconductor industry. Join the online event and experience presentations on the fascinating technologies of the semiconductor industry, insightful discussions on new applications and personal live chats with our experts.
What awaits you
The Semicon Spotlight consists of 6 presentations with live chats with our experts.
Interested? Then take part in the Semicon Spotlight!
Presentations and experts
Dr. Matthias Wissert, Head of R&D Development
EUV lithography is used for the production of state-of-the-art smartphone processors and now also taking a larger and larger market share of the overall semiconductor lithography market. This talk will highlight the technical features of the source CO2 laser to generate the EUV light, which is developed and manufactured by TRUMPF for integration into the ASML lithography system.
Dr. Matthias Wissert studied Electrical Engineering and Information Technology and received a PhD for his work on nanostructured optical antennas at the Karlsruhe Institute of Technology, Germany. After working for a large strategy consulting firm in Paris, France, he joined the TRUMPF EUV R&D activities in 2013.
Dr. Jan Peter Engelstädter, Manager Business Unit RF
& Felix Reichenbach (picture), Industry Manager Semiconductor
The semiconductor industry sees a unprecedented boom, fueled by an expansion of applications under the umbrella of IoT mixed with emerging technologies such as AI, EV or 5G. As TRUMPF´s Electronic division, we are dedicated to provide our customers tailored process power solutions for semiconductor plasma applications. The presentation will showcase some examples of our innovative response to industry trends, how we help our customers develop a new generation of tools for the next technology node while reducing complexity and cost of ownership.
Dr. Jan Peter Engelstädter is an electrical engineer by training with a degree from RWTH Aachen, Germany. He received a PhD in Physics for work in optoelectronics from UCC, Cork, Ireland. After joining in 2010 as an RF design engineer he has held various positions in engineering and business unit management at TRUMPF Hüttinger. He is now leading the Business Unit RF with a strong focus on adding value in semiconductor processing applications.
Felix Reichenbach holds a degree in applied computer science from DHBW Stuttgart and joined the TRUMPF group in 2006 as a supplier quality engineer. After spending time in the SF bay area running the local service group and working as key account manager for semiconductor accounts in the US, he returned back in 2018 to Germany to take over the role as industry manager.
Dr. Dirk Sutter, Head of R&D Ultrafast Laser
Ultrashort laser pulses provide unique properties for applications in materials processing and inspection. TRUMPF’s broad portfolio of ultrafast lasers covers the femto- and picosecond regime, and extends from the infrared to the deep ultraviolet spectrum. Characterized by market-leading reliability these robust systems range from compact Watt-level sources up to the highest power levels available today. This presentation will cover the relevant technology aspects and provide insight into the flexibility of these lasers that define the current state-of-the-art in industrial ultrashort pulse generation.
Dr. Dirk Sutter has more than twenty-five years of experience in ultrafast laser technology. After receiving a PhD from ETH Zurich for the development of few cycle Ti:sapphire oscillators he became senior R&D scientist at Spectra-Physics, USA. Since 2002, he has been heading TRUMPF’s research on ultrafast lasers, and led the TruMicro product development of industrial short and ultrashort pulsed lasers, including in particular the thin-disk, Ytterbium-based TruMicro Series 5000. In 2013, he was co-recipient of the German President’s Award for Innovation in Science and Technology that honored the previous introduction of ultrafast lasers for industrial mass production. His work continues to cover fiber, slab, and thin-disk laser technology for versatile, industrial ultrashort pulse generation.
Dr. Daniel Flamm , Expert optical design and laser technology
The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions e.g., based on nondiffracting beams and three-dimensional-beam splitters, and demonstrate their impact for micro- and nanomachining of a wide range of materials.
Dr. Daniel Flamm studied physics at Friedrich Schiller University in Jena and received his PhD in 2013. His work focused on fiber optics, digital holography and modal decomposition. Since 2014 he has been developing novel materials processing strategies based on ultrashort pulsed lasers for TRUMPF Laser- und Systemtechnik GmbH. In 2019 he became manager of the technology field “Optical Design” of the TRUMPF group.
Dr. Ulf Quentin, Director Sales Micromachining
For more than a decade, ultrashort pulse lasers are spreading into industrial applications. Further opportunities are practically endless, but their realization requires constant expansion of technological limits. This talk will address challenges implied by fundamental principles of pulsed laser processing and highlight developments that answered to these challenges. Examples of ultrafast laser processes from femtosecond glass welding to UV cutting of polymers will illustrate this and represent state of the art industrial processes with ultrashort pulse lasers.
Dr. Ulf Quentin studied Mechanical Engineering and Management and received a PhD for his work on ultrafast laser nano-structuring with optically positioned micro-lenses at Friedrich-Alexander-Universität Erlangen-Nürnberg, Germany. He joined TRUMPF in 2013 and held different management positions in business development and product management of pulsed lasers before being assigned Sales Director for TRUMPF’s micro machining business with short and ultrashort pulse lasers in 2020.
Dr. Michael Förtsch, Chief Executive Officer, Q.ANT
Quantum technologies are not new. On the contrary, they have played a major technological role in shaping the 20th century. Among the success stories that have changed our everyday lives forever are semiconductors, magnetic resonance imaging, or lasers. At the same time, scientists have laid the foundation for transforming the full range of quantum mechanics by experimentally demonstrating quantum mechanical effects such as entanglement and superposition. Through the systematic exploitation of these Quantum mechanical effects, we will experience technological revolutions in the field of Computing, Communication, Imaging, and Sensor technology in the 21st century.
With the founding of Q.ANT in 2018, we have made it our mission to make a significant contribution to this technological revolution using photonics.
During my talk I will report on distinguished projects and their current status with respect to final industrial products.
Dr. Michael Förtsch completed his PhD in the field of Quantum Information at the Max Planck Institute for the Physics of Light in Erlangen, for which he was awarded the Otto Hahn Medal of the Max Planck Society. After an international research stay at NIST in Boulder, he started as a strategy consultant at TRUMPF in 2015. In 2018, he founded the start-up Q.ANT, which focuses on the development and production of photonic quantum technology. Q.ANT's product developments include sensors for autonomous driving and human-machine interaction.